GEW Excimer Lamphead

EXC system

GEW’s EXC system produces vacuum ultraviolet radiation for a range of applications and can be seamlessly integrated onto machinery up to 2.3m wide.

EXC lamps

GEW’s EXC lamp systems utilise dielectric barrier discharge (DBD) lamps to produce quasi-monochromatic vacuum ultraviolet radiation, typically at 172nm. This radiation is commonly used for mattification of surface coatings, modification of surface tension for improved adhesion or surface cleaning for semiconductor and medical industries.

GEW EXC lamps can be produced from 12-230cm and can be custom integrated for your specific application including provision for all required nitrogen inerting and control. They are also seamlessly integrated into the wider GEW UV systems which may be required for gelling or post-cure so that GEW can provide a turnkey curing/cleaning solution for your process. Our experienced engineers also ensure rigorous adherence to international safety standards.

Excimer lamphead

Benefits of EXC

  • Mattifying –
    • On/off instantaneous matting
    • Additive free coatings for increased durability and process simplification
    • Gloss levels >2 G.U.
    • Fully integrated into pre-gelling and final cure UV system
  • Cleaning –
    • High efficacy cleaning on a wide range of semiconductor substrates
    • Non contact
  • Surface modification –
    • Significant increase in surface energy
  • Cold process for heat-sensitive materials
  • Low energy, high-efficiency UV generation (up to 40%)

EXC specification

Max electrical power5W / cm
Peak wavelength172nm*
Irradiance at focal point30mW / cm²
Maximum length230cm
Standard cross section164mm W x 130mm H
CoolingN2 / Air
Standard max operating temperature40°C (104°F)
Standard max humidityNon-condensing
*222nm & 308nm available on request

Speak directly to a sales representative

These products use excimer (or exciplex) dielectric barrier discharge (DBD) lamps as the UV light source. Primarily used to produce vacuum ultraviolet (VUV) radiation, GEW can supply many variations and widths to suit a wide range of applications.

To find out more about EXC, contact us now on one of the options below.

David Lyus GEW

Region, UK:
David Lyus
International Sales Manager

T: +44 7713 085 381

Email David directly

Jennifer Heathcote

Region, Americas:
Jennifer Heathcote
Vice President, Business Development

T: +1 440 381 5606

Email Jennifer directly

Marcus Greenbrook

Region, International:
Marcus Greenbrook
Director, International Sales

T: +44 7764 986 911

Email Marcus directly